A heat chemicals gas sensor using a chalcogenide type nano line, and a manufacturing method for the same

Japanese Patent JP6007342

B2

The present invention relates to a thermochemical gas sensor using chalcogenide-based nanowires and a method for same, comprising: a porous alumina template comprising a front surface, a rear surface, and side surfaces and provided with a plurality of pores which penetrate the front surface and the rear surface; a seed layer provided on the rear surface of the porous alumina template for covering the plurality of pores and having electric conductivity; a plurality of chalcogenide-based nanowires provided inside the plurality of pores and coming into contact with the seed layer, which is exposed through the plurality of pores; an electrode provided on the front surface of the porous alumina template and coming into contact with the chalcogenide-based nanowires; an electrode wire for electrically connecting with the electrode; and a porous white gold-alumina composite or a porous palladium-alumina composite provided above the electrode for causing a heat-emitting reaction by coming into contact with a gas to be detected, wherein the chalcogenide-based nanowires comprise BixTey(1.5≰x≰2.5, 2.4≰y≰3.6), SbxTey(1.5≰x≰2.5, 2.4≰y≰3.6) or (Bi1-xSbx)Te3(0