Title:
熱損失式圧力測定装置および方法
Document Type and Number:
Japanese Patent JP2006503290
Kind Code:
A
Abstract:
A heat loss gauge for measuring gas pressure in an environment includes a resistive sensing element and a resistive compensating element. The resistive compensating element is in circuit with the sensing element and is exposed to a substantially matching environment. An electrical source is connected to the sensing element and the compensating element for applying current through the elements. The current through the sensing element is substantially greater than the current through the compensating element. Measuring circuitry is connected to the sensing element and the compensating element for determining gas pressure in the environment to which the sensing element and compensating element are exposed based on electrical response of the sensing element and the compensating element.
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Inventors:
Borenstein Michael Dee
Application Number:
JP2004544887A
Publication Date:
January 26, 2006
Filing Date:
October 14, 2003
Export Citation:
Assignee:
Helix Technology Corporation
International Classes:
G01L21/12; G01L9/02; G01L19/04
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Masashi Noda
Kenro Tsutsumi