Title:
HEAT-RESISTANT RESIN FILM AND METHOD FOR PRODUCING THE SAME, HEATING FURNACE AND METHOD FOR MANUFACTURING IMAGE DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP2019077871
Kind Code:
A
Abstract:
To provide a heat-resistant resin film which generates less outgas and has high mechanical characteristics.SOLUTION: A heating furnace is provided that comprises: a temperature measurement part which measures a temperature in a furnace; a temperature adjustment part which adjusts a temperature in the furnace; an oxygen concentration measurement part which measures oxygen concentration in the furnace; a gas flow rate adjustment part which adjusts a flow rate of heating atmosphere gas into the furnace; and a control part which controls the temperature adjustment part and the gas flow rate adjustment part, the control part controls the gas flow rate adjustment part according to oxygen concentration in the furnace measured by the oxygen concentration measurement part, and controls the temperature adjustment part so that the temperature in the furnace measured by the temperature measurement part after the oxygen concentration reaches predetermined oxygen concentration becomes predetermined temperature.SELECTED DRAWING: Figure 1
Inventors:
MIYAZAKI DAICHI
TOMIKAWA MASAO
TOMIKAWA MASAO
Application Number:
JP2018221955A
Publication Date:
May 23, 2019
Filing Date:
November 28, 2018
Export Citation:
Assignee:
TORAY INDUSTRIES
International Classes:
C08J5/18; C08G73/10; F27D7/06; F27D19/00; G03F7/004; G03F7/023; G03F7/42; H01L21/312; H01L51/50; H05B33/02; H05B33/10; H05B33/22
Domestic Patent References:
| JP2003002736A | 2003-01-08 | |||
| JP2009243738A | 2009-10-22 | |||
| JP2008525566A | 2008-07-17 |