Thermal stress reduction methods and equipment by adjusting and controlling the lamp operating temperature

Title:

Thermal stress reduction methods and equipment by adjusting and controlling the lamp operating temperature

Document Type and Number:

Japanese Patent JP6293755

Kind Code:

B2

Abstract:

A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

Inventors:

One Jin Chu Young
Chimmarugi Anant
Pattil Rajief
Kim Eric
Bruner Rudolph
The Ann Chuen
Wilson Lauren
Gross Kenneth Pee
Bezel Ilya
Lafargue Cedric
Scott Daniel
Vola Yunas
Delstein Matthew

Application Number:

JP2015530004A

Publication Date:

March 14, 2018

Filing Date:

August 28, 2013

Export Citation:

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Assignee:

KLA-Tenker Corporation

International Classes:

F21V29/57; F21S2/00; F21V23/00; F21V29/503; F21V29/85; F28C3/04; H01J61/52

Domestic Patent References:

JP2002541630A
JP2072554A
JP5028968A
JP2010197583A
JP2004296125A
JP2011076892A

Foreign References:

WO2011039669A1
US5758823
US20120037926

Attorney, Agent or Firm:

Patent Corporation yki International Patent Office

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