熱処理炉 - Shimadzu Industrial Systems Co., Ltd.

Title:

熱処理炉

Document Type and Number:

Japanese Patent JP7238248

Kind Code:

B2

Abstract:

To provide a heat treatment furnace capable of collecting even the particulate dust released from an object to be treated.SOLUTION: A heat treatment furnace 10 comprises a pressure container 12, a tight box 16 storing an object 56 to be treated, gas sources 18, 26 of gases to be introduced into the pressure container 12 and the tight box 16, a pump 32 exhausting the gases from the pressure container 12 and the tight box 16, first exhaust piping 34 connecting the pump 32 from the pressure container 12, second exhaust piping 38 connected to the tight box 12, a trap 46 in which the halfway of the second exhaust piping 38 is constituted by double piping 68 made of inner side piping 64 and outer side piping 66, a coolant is made to flow between the inner side piping 64 and the outer side piping 66 and a cooling fin 70 is arranged inside of the inner side piping 64 and a plurality of filters 48 provided at the downstream of the trap 46 in the second exhaust piping 38.SELECTED DRAWING: Figure 1

Inventors:

Ryunosuke Yamada
Hiroyuki Shimizu
Takamune Komukai
Morinori Suzuki
Yousuke Morimoto

Application Number:

JP2019160937A

Publication Date:

March 14, 2023

Filing Date:

September 04, 2019

Export Citation:

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