熱型光検出器、熱型光検出装置、および電子機器

Title:

熱型光検出器、熱型光検出装置、および電子機器

Document Type and Number:

Japanese Patent JP5728978

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To increase the detection wavelength band of a thermal photodetector.SOLUTION: A thermal photodetector 200 includes a substrate 20, a support member 215 supported on the substrate 20, and a thermal detection element 220 formed in contact with the support member 215. A first wavelength λ1 resonates between a first reflection surface A1 as a surface of a first part of the thermal detection element 220 and a third reflection surface A3 that is a surface of one of the substrate 20, the support member 215, and the thermal detection element 220, and that is provided apart from the first reflection surface A1 by a first distance H1. A second wavelength λ2, which is different from the first wavelength λ1, resonates between the third reflection surface A3 and a second reflection surface A2 that is a surface of a second part of the thermal detection element 220, which is different from the first part thereof, and that is provided apart from the third reflection surface A3 by a second distance H3.

Inventors:

Takashi Noda

Application Number:

JP2011020415A

Publication Date:

June 03, 2015

Filing Date:

February 02, 2011

Export Citation:

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