Title:
The heater applied to batch type thermal treatment equipment and the device
Document Type and Number:
Japanese Patent JP5973728
Kind Code:
B2
Inventors:
Ho, Kwangsan
Kang, Hoyoung
Kang, Hoyoung
Application Number:
JP2011518650A
Publication Date:
August 23, 2016
Filing Date:
July 16, 2009
Export Citation:
Assignee:
TERASEMICON CORPORATION
International Classes:
H01L21/324; C22C38/00; C22C38/30; F27B17/00; F27D7/02; F27D9/00; F27D11/02; H01L31/04; H05B3/10; H05B3/42
Domestic Patent References:
| JP2002175868A | ||||
| JP2006286222A | ||||
| JP2006112762A | ||||
| JP2000012471A | ||||
| JP2002221394A | ||||
| JP2003194478A | ||||
| JP2006112762A | ||||
| JP2003123651A |
Foreign References:
| WO2006022232A1 |
Attorney, Agent or Firm:
Patent business corporation Oshima patent office
Masahiko Kimura
Tachikawa Yukio
Tomomi Takao
Yousuke Katsumi
Masahiko Kimura
Tachikawa Yukio
Tomomi Takao
Yousuke Katsumi
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