Title:
ヒータユニット、焼成炉及び珪素含有多孔質セラミック焼成体の製造方法
Document Type and Number:
Japanese Patent JPWO2013088495
Kind Code:
A
Inventors:
Saijo 貴満
Tadafumi Ohashi
Tadafumi Ohashi
Application Number:
JP2011078693W
Publication Date:
April 27, 2015
Filing Date:
December 12, 2011
Export Citation:
Assignee:
IBIDEN CO., LTD.
International Classes:
F27B9/36; H05B3/14; F27D11/02; F27B9/06; H05B3/64
Attorney, Agent or Firm:
Patent business corporation Yasutomi international patent firm