Title:
結晶成長炉に用いられるアンチアーク放電の加熱電極アセンブリ
Document Type and Number:
Japanese Patent JP3186185
Kind Code:
U
Abstract:
A heating electrode assembly for a crystal growth furnace includes: a heat insulation board unit that is disposed between a furnace wall and a heater, that includes a first surface facing the furnace wall and a second surface facing the heater, and that is formed with a hole extending through the first surface and the second surface; an electrode unit that includes an electricity input portion mounted to the furnace wall, a post portion disposed in the hole, and an abutment flange connecting the post portion and the heater; and an electrical insulating unit including a tubular sleeve that is disposed in the hole and that surrounds the post portion, and a pad that is clamped between the abutment flange and the second surface.
Inventors:
Huang Zhiwei
Resident
Liu An Yan
Resident
Liu An Yan
Application Number:
JP2013004008U
Publication Date:
September 19, 2013
Filing Date:
July 11, 2013
Export Citation:
Assignee:
Yui Seikou No Feng Fen Co., Ltd.
International Classes:
C30B29/06; F27B3/08; F27B3/20; F27D11/10
Attorney, Agent or Firm:
Patent Business Corporation Saegusa International Patent Office