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Patent Searching and Data


Title:
高分子化合物、化学増幅ポジ型レジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP4666177
Kind Code:
B2
Inventors:
Jun Hatakeyama
Yuji Harada
Takanobu Takeda
Application Number:
JP2007090588A
Publication Date:
April 06, 2011
Filing Date:
March 30, 2007
Export Citation:
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Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C08G61/08; C08F232/08; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
JP2004107377A
JP2003096007A
Foreign References:
WO2070023710A1
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa