Title:
高圧毛細管マイクロ流体バルブ装置およびその製造方法
Document Type and Number:
Japanese Patent JP4909887
Kind Code:
B2
Abstract:
A freeze-thaw valve and a method of micro-machining the freeze-thaw valve is provided and includes a valve housing, wherein the valve housing defines a housing cavity and includes a housing inlet, a housing vent, a capillary tubing inlet and a capillary tubing outlet. A valve body is provided, at least a portion of which is lithographically constructed, wherein the valve body includes a refrigerant inlet, a refrigerant outlet and an expansion chamber. The expansion chamber is disposed to communicate the refrigerant inlet with the refrigerant outlet and includes a restriction region having a flow restriction. Additionally, the valve body is disposed within the housing cavity to form an insulating channel between the valve housing and the valve body.
Inventors:
Crotker, Robert Davrill
Pamela F, Kyaton
Gerhard, Jeff See
Pamela F, Kyaton
Gerhard, Jeff See
Application Number:
JP2007509568A
Publication Date:
April 04, 2012
Filing Date:
April 19, 2005
Export Citation:
Assignee:
Waters Technologies Corporation
International Classes:
F16K13/00; C23F1/00; C23F4/00; F15C1/04; F15C5/00; F16K49/00; F16K99/00
Domestic Patent References:
| JP2003336949A | ||||
| JP2004088048A | ||||
| JP2004028444A | ||||
| JP2004521315A | ||||
| JP53085528A | ||||
| JP2002215241A | ||||
| JP2002519595A |
Attorney, Agent or Firm:
Yoshio Kawaguchi
Makoto Ono
Chihiro Watanabe
Kenkyo Kanayama
Katsuma Osaki
Mitsuaki Tsubokura
Makoto Ono
Chihiro Watanabe
Kenkyo Kanayama
Katsuma Osaki
Mitsuaki Tsubokura