Title:
長期間安定度を有する高感度圧力センサ
Document Type and Number:
Japanese Patent JP2004528576
Kind Code:
A
Abstract:
A high sensitivity pressure sensor with long term stability including a housing with first and second chambers, a membrane separating the first and second chambers, a first electrode located in the first chamber and spaced from one side of the membrane forming a first capacitor therewith, and a second electrode located in the second chamber and spaced from an opposite side of the membrane forming a second capacitor therewith. A measuring circuit is connected across the first and second capacitors for measuring membrane displacement by detecting differences in capacitance between the first and second capacitors and a compensation circuit is configured to apply an electric field to the membrane as a compensating force by reducing the voltage difference between the first electrode and the membrane and simultaneously increasing the voltage difference between the second electrode and the membrane or vice versa to provide long term stability. The invention also features a unique compensation circuit for a pressure sensor and a method of making and operating a pressure sensor.
Inventors:
Gorkfeld, Youssef
Application Number:
JP2003500519A
Publication Date:
September 16, 2004
Filing Date:
May 24, 2002
Export Citation:
Assignee:
Panametrics Incorporated
International Classes:
G01L13/06; G01L9/00; G01L9/12; G01L13/02; G01L19/02; G01L19/04; (IPC1-7): G01L13/06
Attorney, Agent or Firm:
Kenichi Matsumoto
Hirokazu Ogura
Nobukazu Ito
Hirokazu Ogura
Nobukazu Ito