Title:
恒温真空容器及びそれを用いた露光装置
Document Type and Number:
Japanese Patent JP4065528
Kind Code:
B2
Abstract:
An apparatus for processing an object includes a vessel which forms a pressure-reduced inner space and accommodates the object, a member which is supported by an inner side of the vessel through a heat insulator, and a temperature adjusting portion which adjusts a temperature of the member.
Inventors:
Takenori Emoto
Application Number:
JP2003064199A
Publication Date:
March 26, 2008
Filing Date:
March 10, 2003
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; C21B7/24; G03B27/42; G03C5/00; G03F7/20
Domestic Patent References:
| JP2000260683A | ||||
| JP10223520A | ||||
| JP2002353116A | ||||
| JP8236423A | ||||
| JP2002359172A |
Attorney, Agent or Firm:
Ryosuke Fujimoto