Title:
A hopper and thermal spraying equipment
Document Type and Number:
Japanese Patent JP6122666
Kind Code:
B2
Abstract:
A hopper is configured to supply a fine particle material. The hopper includes a container configured to accommodate therein a material in a powder form having a diameter ranging from about 0.1 µm to about 10 µm; a pressure controller configured to apply a pressure difference to an inside of the container periodically; and a shaker configured to apply vibration to the container. Further, the material accommodated in the container is supplied through a hole, which is formed at the container, by the periodic pressure difference and the vibration, and is carried by a carrier gas.
Inventors:
Yoshiyuki Kobayashi
Satoshi Taga
Satoshi Taga
Application Number:
JP2013045858A
Publication Date:
April 26, 2017
Filing Date:
March 07, 2013
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B65G53/66; B65G65/40; C23C4/12
Domestic Patent References:
| JP2158522A | ||||
| JP6298376A | ||||
| JP47000937B1 | ||||
| JP8199372A | ||||
| JP2002105618A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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