Title:
ドレス方法
Document Type and Number:
Japanese Patent JP7386636
Kind Code:
B2
Abstract:
One objective of the present invention is to provide a dress method capable of suppressing time required for a flat dress. The dress method includes: a position detection step (ST4) of photographing a dress board held on a holding table through a photographing unit, and detecting the position of the outer circumference of the dress board; a position application step (ST6) of locating a direction from one end of the dress board toward the other end in parallel with the axial center of a spindle, and locating the bottom of a cutting blade at a slotting depth for slotting into the dress board, outside one end of the dress board based on the position of the outer circumference of the dress board detected through the position detection step (ST4); and a dress step (ST7) of flattening the front end of the cutting blade by cutting the dress board from one end to the other end by moving the cutting blade, relative to the dress board after the position application step (ST6).
Inventors:
Chua Hock Shoe
Application Number:
JP2019129382A
Publication Date:
November 27, 2023
Filing Date:
July 11, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B53/00; H01L21/301
Domestic Patent References:
| JP2018144206A | ||||
| JP2006218571A | ||||
| JP2002036233A |
Attorney, Agent or Firm:
Sakai International Patent Office