Title:
照明光学系、それを用いた露光装置及びデバイスの製造方法
Document Type and Number:
Japanese Patent JP5570225
Kind Code:
B2
Inventors:
Osaka 昇
Takaaki Terashi
Takaaki Terashi
Application Number:
JP2010000916A
Publication Date:
August 13, 2014
Filing Date:
January 06, 2010
Export Citation:
Assignee:
Canon, Inc.
International Classes:
H01L21/027; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Ryoichi Takaoka