Title:
照明光学系、露光装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP5604813
Kind Code:
B2
Inventors:
Norio Miyake
Application Number:
JP2009141848A
Publication Date:
October 15, 2014
Filing Date:
June 15, 2009
Export Citation:
Assignee:
NIKON CORP.
International Classes:
H01L21/027; G02B3/00; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Takao Yamaguchi