Title:
照明光学系、露光装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP5700272
Kind Code:
B2
Inventors:
Toru Fujii
Application Number:
JP2010092270A
Publication Date:
April 15, 2015
Filing Date:
April 13, 2010
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
| JP2009111369A | ||||
| JP2007007660A | ||||
| JP2006041530A |
Foreign References:
| WO2008004664A1 | ||||
| WO2009125511A1 |
Attorney, Agent or Firm:
Takao Yamaguchi