Title:
照明光学系、露光装置、露光方法、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP6390879
Kind Code:
B2
More Like This:
Inventors:
Tea circle Kota
Takashi Mori
Takashi Mori
Application Number:
JP2017033199A
Publication Date:
September 19, 2018
Filing Date:
February 24, 2017
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JP2007227918A | ||||
| JP2010192868A | ||||
| JP2010034486A | ||||
| JP2010087389A | ||||
| JP2011003908A |
Foreign References:
| WO2009060744A1 |
Attorney, Agent or Firm:
Takao Yamaguchi