Title:
照明光学系及び露光装置並びにデバイス製造方法
Document Type and Number:
Japanese Patent JP6570298
Kind Code:
B2
Inventors:
Arai Manabu
Application Number:
JP2015083708A
Publication Date:
September 04, 2019
Filing Date:
April 15, 2015
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JP2001244183A | ||||
| JP2012222363A | ||||
| JP2005191495A | ||||
| JP2005175040A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu