Title:
照明光学系、露光装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP6621057
Kind Code:
B2
Abstract:
An illumination optical system can form a pupil intensity distribution with a desired beam profile. The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a spatial light modulator which has a plurality of optical elements arrayed on a predetermined surface and individually controlled and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system; a divergence angle providing member which is arranged in a conjugate space including a surface optically conjugate with the predetermined surface and which provides a divergence angle to an incident beam and emits the beam; and a polarizing member which is arranged at a position in the vicinity of the predetermined surface or in the conjugate space and which changes a polarization state of a partial beam of a propagating beam propagating in an optical path.
Inventors:
Hirohisa Tanaka
Hiroshi Oki
Shinichi Nakajima
Hiroshi Oki
Shinichi Nakajima
Application Number:
JP2018018451A
Publication Date:
December 18, 2019
Filing Date:
February 05, 2018
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B3/00; G02B5/00; G02B5/02; G02B19/00
Domestic Patent References:
| JP2005076045A1 | ||||
| JP2007335859A | ||||
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Foreign References:
| WO2011154227A1 | ||||
| WO2010009788A1 | ||||
| WO2011021444A1 | ||||
| WO2011078070A1 |
Attorney, Agent or Firm:
Takao Yamaguchi