Title:
マイクロリソグラフィ用の照明光学ユニット
Document Type and Number:
Japanese Patent JP5335906
Kind Code:
B2
Inventors:
Fiorca damian
Toteck Michael
Enquish Hartmut
Mulender stephan
Toteck Michael
Enquish Hartmut
Mulender stephan
Application Number:
JP2011515143A
Publication Date:
November 06, 2013
Filing Date:
May 27, 2009
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G02B17/08; G02B5/30; G03F7/20; H01L21/027
Domestic Patent References:
| JP2006128321A | ||||
| JP7283116A | ||||
| JP2005121702A |
Foreign References:
| WO2006111319A1 | ||||
| WO2006078843A1 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi