Title:
Illumination optics unit for projection lithography and hollow waveguide components for it
Document Type and Number:
Japanese Patent JP6347895
Kind Code:
B2
Inventors:
Degunter Marx
Stammler Thomas
Stammler Thomas
Application Number:
JP2017516112A
Publication Date:
June 27, 2018
Filing Date:
September 18, 2015
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
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Foreign References:
| WO2003050857A1 | ||||
| WO2014139807A1 | ||||
| WO2012139634A1 |
Attorney, Agent or Firm:
Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Yoshinori Kishi
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Yoshinori Kishi