照明光学装置、露光装置および露光方法

Title:

照明光学装置、露光装置および露光方法

Document Type and Number:

Japanese Patent JP5761329

Kind Code:

B2

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Inventors:

Osamu Yatsu
Toshi Nishinaga
Kudo Taketo

Application Number:

JP2013273351A

Publication Date:

August 12, 2015

Filing Date:

December 27, 2013

Export Citation:

Assignee:

NIKON CORPORATION

International Classes:

G03F7/20; G02B19/00

Domestic Patent References:

Foreign References:

WO2003075076A1

Attorney, Agent or Firm:

Seiji Ohno
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani

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