Title:
ILLUMINATION OPTICAL DEVICE, ILLUMINATION METHOD, EXPOSURE DEVICE, EXPOSURE METHOD, AND METHOD OF PRODUCING DEVICE
Document Type and Number:
Japanese Patent JP2018112755
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a spacial light modulator for improving a degree of freedom of intensity level of a pupil intensity distribution when used in an illumination optical system.SOLUTION: A spatial light modulator used in an illumination optical system for illuminating a surface to be illuminated by light from a light source includes: a spatial light modulator having a plurality of optical elements individually controlled by arranging in a predetermined plane; a spatial light modulator element by imparting spatial light modulation to light incident from the light source and making a light flux of an intensity level according to its position enter for every element of the plurality of optical elements; and a controller for controlling individually the plurality of optical elements based on the information of the intensity level of the incident light flux to each of the plurality of the optical elements.SELECTED DRAWING: Figure 2
Inventors:
TANITSU OSAMU
Application Number:
JP2018070576A
Publication Date:
July 19, 2018
Filing Date:
April 02, 2018
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20
Domestic Patent References:
| JP5884871B2 | 2016-03-15 | |||
| JP2009117671A | 2009-05-28 | |||
| JP2007505488A | 2007-03-08 | |||
| JP2009105206A | 2009-05-14 | |||
| JP2009105396A | 2009-05-14 | |||
| JP2009272624A | 2009-11-19 | |||
| JP2003022967A | 2003-01-24 | |||
| JP2008294419A | 2008-12-04 |
Foreign References:
| WO2009128293A1 | 2009-10-22 | |||
| WO2009060744A1 | 2009-05-14 | |||
| WO2009150871A1 | 2009-12-17 | |||
| WO2009087805A1 | 2009-07-16 |
Attorney, Agent or Firm:
Takao Yamaguchi
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