Title:
画像処理システム
Document Type and Number:
Japanese Patent JP7364540
Kind Code:
B2
Abstract:
Provided is an image processing system capable of estimating a three-dimensional shape of a semiconductor pattern or a particle by solving problems of measurement reduction in a height direction and taking an enormous amount of time at a time of acquiring learning data. The image processing system according to the disclosure stores a detectable range of a detector provided in a charged particle beam device in a storage device in advance, generates a simulated image of a three-dimensional shape pattern using the detectable range, and learns a relationship between the simulated image and the three-dimensional shape pattern in advance.
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Inventors:
Nobuhiro Okai
Naomasa Suzuki
Muneyuki Fukuda
Naomasa Suzuki
Muneyuki Fukuda
Application Number:
JP2020132779A
Publication Date:
October 18, 2023
Filing Date:
August 05, 2020
Export Citation:
Assignee:
Hitachi High-Tech Co., Ltd.
International Classes:
H01J37/22; G06T7/00; G06T7/50; H01J37/28; H01L21/66
Domestic Patent References:
| JP11074326A | ||||
| JP2007129059A | ||||
| JP2010072700A | ||||
| JP2015008148A | ||||
| JP2017199606A |
Foreign References:
| US20150136960 | ||||
| US20170316915 | ||||
| US20190311877 |
Attorney, Agent or Firm:
Patent Attorney Corporation Hiraki International Patent Office
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