Title:
An imprint device, a manufacturing method of the article using it
Document Type and Number:
Japanese Patent JP6004738
Kind Code:
B2
Abstract:
An imprint apparatus molds an uncured resin on a substrate and cures the resin to form a pattern of the cured resin on the substrate. The apparatus includes a mold holding unit that holds the mold, a substrate holding unit that holds the substrate, a deforming unit that deforms the mold held by the mold holding unit into a convex shape toward the substrate, a driving unit that changes an attitude of the mold or the substrate during a releasing operation in which the mold deformed into the convex shape is released from the resin to thereby make the position of a contact region at which the mold is brought into contact with the resin movable, a measuring unit that acquires image information indicating a state of the contact region, and a control unit configured to control the operation of the driving unit based on the image information.
Inventors:
Hama Zenichi Tani
Kei Hasegawa
Setsuo Yoshida
Yoshihiro Shiode
Kei Hasegawa
Setsuo Yoshida
Yoshihiro Shiode
Application Number:
JP2012111419A
Publication Date:
October 12, 2016
Filing Date:
May 15, 2012
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| JP2010221374A | ||||
| JP2012231056A | ||||
| JP2011100952A | ||||
| JP2012507141A | ||||
| JP2012507859A | ||||
| JP2006506814A | ||||
| JP2005533393A | ||||
| JP10172897A | ||||
| JP2011512019A | ||||
| JP2008540164A | ||||
| JP2013058517A |
Attorney, Agent or Firm:
Ryoichi Takaoka
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