IMPRINT DEVICE, IMPRINT METHOD, AND METHOD FOR MANUFACTURING ARTICLE

Japanese Patent JP2017103313

A

PROBLEM TO BE SOLVED: To provide an imprint device and an imprint method, capable of highly accurately supplying an imprint material.SOLUTION: An imprint device 100 forms a pattern of a hardened imprint material 102 on a substrate 101 by bringing a mold 103 into contact with the imprint material 102 and hardening the imprint material 102. The imprint device comprises: moving means 111 for moving the substrate 101; discharging means 115 including a discharge port 116a and for discharging the imprint material 102 from the discharge port 116a while the moving means 111 is moving the substrate 101; measuring means 126 for measuring information about a position in a height direction of a surface of the substrate 101; determining means 122 for determining information about the distance distribution between the discharge port 116a and the substrate 101 on the basis of the determination results of the measuring means 126; and correcting means 122 for correcting the supply conditions of the imprint material 102 on the basis of the information determined by the determining means 122.SELECTED DRAWING: Figure 3

TSUTSUMI RYOSUKE
SAKAMOTO EIJI
NANBA HISASHI

JP2015234318A

June 08, 2017

November 30, 2015

Click for automatic bibliography generation  

CANON KK

H01L21/027

JP2012069758A	2012-04-05
JP4541560B2	2010-09-08
JP2003053957A	2003-02-26
JP2014103189A	2014-06-05
JP2007320098A	2007-12-13
JP2011151092A	2011-08-04
JPH0943424A	1997-02-14
JPH06163499A	1994-06-10
JP2012190877A	2012-10-04
JP2007296783A	2007-11-15
JP2013065624A	2013-04-11
JP2012054322A	2012-03-15
JP2011062590A	2011-03-31
JP2011192917A	2011-09-29

US20100102471A1

2010-04-29

Takuma Abe
Sogo Kuroiwa

Previous Patent: A magnetic manufacturing method

Next Patent: An imprint device, an instrumentation method, an imprint method, and a manufacturing method of an ar...