Title:
インプリントリソグラフィ装置および方法
Document Type and Number:
Japanese Patent JP5075232
Kind Code:
B2
Inventors:
Cole, Roelov
Wistar, thunder, frederick
Wistar, thunder, frederick
Application Number:
JP2010162398A
Publication Date:
November 21, 2012
Filing Date:
July 20, 2010
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| JP10340874A | ||||
| JP2002270540A | ||||
| JP2002359180A | ||||
| JP2003109915A | ||||
| JP2004103817A | ||||
| JP2004235613A | ||||
| JP2004335552A | ||||
| JP2004504718A | ||||
| JP2005101313A | ||||
| JP2006013401A | ||||
| JP2006352121A | ||||
| JP2007181938A | ||||
| JP2008012858A | ||||
| JP2008260273A | ||||
| JP2008270798A |
Foreign References:
| WO2009153925A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki