Title:
IMPRINT METHOD AND IMPRINT DEVICE
Document Type and Number:
Japanese Patent JP2016197672
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To enhance the transfer quality of a fine pattern while preventing photocurable resin coated on a substrate from wet-spreading at the outside of the edge portion of the substrate.SOLUTION: A print method comprises a step of mounting a substrate in a mount region 41 on a stage so that a certain gap portion 73 is formed between the substrate 71 coated with photocurable resin 70 and an elastic member 50 provided on a stage 40, a step of sequentially pressing the photocurable resin and the elastic member with a pressing roll 10 via a mold 30 which is configured like a thin plate, has flexibility and light-permeability and is held with predetermined tension, whereby a fine pattern 33 formed on a first surface 31 of the mold is pressed against the photocurable resin, and a step of applying light to the photocurable resin while the fine pattern is pressed against the photocurable resin. The thickness of the elastic member is larger than the thickness of the substrate, and the elastic member is pressed by a press roll to be deformed, so that the difference in thickness between the elastic member and the substrate is reduced.SELECTED DRAWING: Figure 1
Inventors:
IWASE TEPPEI
ISHIKAWA AKIHIRO
WADA NORIHIKO
ISHIKAWA AKIHIRO
WADA NORIHIKO
Application Number:
JP2015077300A
Publication Date:
November 24, 2016
Filing Date:
April 06, 2015
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| JP2010080713A | 2010-04-08 | |||
| JP2014226877A | 2014-12-08 | |||
| JP2005005284A | 2005-01-06 | |||
| JP2016162870A | 2016-09-05 |
Foreign References:
| WO2013191206A1 | 2013-12-27 |
Attorney, Agent or Firm:
Morimoto International Patent Office