Title:
磁気抵抗素子の感応特性評価装置
Document Type and Number:
Japanese Patent JP4979165
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a sensitivity evaluation device of a magnetic resistance element which is excellent in possibility of highly accurate evaluation of sensitivity of a magnetic resistance element when sensitivity property of a magnetic resistance element is evaluated highly precisely. SOLUTION: A sensitivity evaluation device of a magnetic resistance element has an electromagnet unit 42 with two electromagnets. A pair of magnetic poles of each electromagnet are formed at a tip of a yoke 56 extending from a pair of cores of the electromagnet, and are positioned at a wafer table 12 side, whereon a wafer W is mounted, from an outer circumference of a solenoid of an electromagnet.
Inventors:
Yoshihiko Yokoyama
Takaaki Kawai
Kazuhiko Okita
Takaaki Kawai
Kazuhiko Okita
Application Number:
JP2001253232A
Publication Date:
July 18, 2012
Filing Date:
August 23, 2001
Export Citation:
Assignee:
Tohoku Special Steel Co., Ltd.
International Classes:
G01R31/26; H01L43/12; G01R33/09; G01R33/12; G01R35/00; H01L21/66; H01L43/06; H01L43/08
Domestic Patent References:
| JP9283578A | ||||
| JP10256620A | ||||
| JP10124828A | ||||
| JP11259828A | ||||
| JP11073612A | ||||
| JP8329431A |
Attorney, Agent or Firm:
Koji Nagato