Title:
An infrared detection element, an infrared detection machine, and an infrared type gas sensor
Document Type and Number:
Japanese Patent JP6179858
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an infrared detection element, an infrared detector and an infrared gas sensor each of which can have increased sensitivity.SOLUTION: An infrared detection element 20a is provided in which a first pyroelectric element 22 and a second pyroelectric element 23 are formed side by side in one pyroelectric substrate 21. The first pyroelectric element 22 includes a first front surface electrode 22a, a first rear surface electrode 22b, and a first part 22c interposed between the first front surface electrode 22a and the first rear surface electrode 22b in the pyroelectric substrate 21. The second pyroelectric element 23 includes a second front surface electrode 23a, a second rear surface electrode 23b, and a second part 23c interposed between the second front surface electrode 23a and the second rear surface electrode 23b in the pyroelectric substrate 21. In the pyroelectric substrate 21, a slit 26 shaped along the outer periphery of the first pyroelectric element 22 is formed in a peripheral part surrounding the first pyroelectric element 22 while bypassing first front surface wiring 24a and first rear surface wiring 24b, and a peripheral part surrounding the second pyroelectric element 23 is continuous throughout along the periphery of the second part 23c.
Inventors:
Yoshifumi Watanabe
Sadayuki Kado
Junichi Azumi
Sadayuki Kado
Junichi Azumi
Application Number:
JP2013211463A
Publication Date:
August 16, 2017
Filing Date:
October 08, 2013
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
G01J1/02; G01N21/3504; H01L35/22; H01L37/00
Domestic Patent References:
| JP518816A | ||||
| JP3043381U | ||||
| JP2012159450A | ||||
| JP335128A | ||||
| JP2011128015A | ||||
| JP200549171A | ||||
| JP201227010A |
Foreign References:
| US20120318980 |
Attorney, Agent or Firm:
Patent business corporation Hokuto patent office
Keisei Nishikawa
Keisei Nishikawa