Title:
An infrared sensor, a heat detection element, and a heat detection method using it
Document Type and Number:
Japanese Patent JP6264525
Kind Code:
B2
Abstract:
An infrared sensor includes a heat sensing element in which a first electrode, a dielectric film, and a second electrode are sequentially laminated; and an electric charge detection device. The dielectric film represents antiferroelectricity and has a spontaneous polarization in a predetermined measurement environment. The electric charge detection device calculates an amount of relaxation current flowing by a change of the spontaneous polarization, and senses heat of the heat sensing element based on temperature dependence of the amount of relaxation current.
Inventors:
Takayuki Yonemura
Takashi Noda
Yasushi Tsuchiya
Takashi Noda
Yasushi Tsuchiya
Application Number:
JP2013062664A
Publication Date:
January 24, 2018
Filing Date:
March 25, 2013
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01J1/02; G01J5/34
Domestic Patent References:
| JP49023898Y1 | ||||
| JP2000019013A | ||||
| JP4357888A | ||||
| JP60131703A | ||||
| JP9237921A | ||||
| JP5112700A | ||||
| JP7106658A |
Foreign References:
| US20110182321 |
Attorney, Agent or Firm:
Hiroyuki Kurihara