Title:
An infrared sensor and thermoelectric conversion elements
Document Type and Number:
Japanese Patent JP6202245
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an infrared sensor and a thermoelectric conversion element which enable the increase of the sensitivity of infrared sensors.SOLUTION: An infrared sensor comprises a thermoelectric conversion element 3 having a first electrode 7, a second electrode 8, and a pyroelectric film 9 provided between the first electrode 7 and the second electrode 8, and operable to produce a surface electric charge according to a change in temperature. The pyroelectric film 9 is of a complex oxide having a perovskite structure including Bi, La, Fe and Mn. The thermoelectric conversion element 3 is connected to a transistor 2, and the transistor 2 preferably outputs a detection signal based on a surface electric charge produced by the thermoelectric conversion element 3.
Inventors:
Takayuki Yonemura
Takashi Noda
Yasushi Tsuchiya
Takashi Noda
Yasushi Tsuchiya
Application Number:
JP2013061117A
Publication Date:
September 27, 2017
Filing Date:
March 22, 2013
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L37/02; G01J1/02; G01J5/34
Domestic Patent References:
| JP2012136487A | ||||
| JP2011174918A | ||||
| JP9126895A | ||||
| JP2000286473A | ||||
| JP2012018995A | ||||
| JP2011192950A | ||||
| JP2012018994A | ||||
| JP2013004780A | ||||
| JP2011232245A |
Foreign References:
| WO2007125664A1 |
Attorney, Agent or Firm:
Hiroyuki Kurihara