Title:
An inspection circuit, an inspection method, and an inspection device of a semiconductor device
Document Type and Number:
Japanese Patent JP5908418
Kind Code:
B2
Abstract:
According to one embodiment, a stack includes first and second wiring structures and an inspection circuit. The inspection circuit includes a switching circuit having an input terminal, a drive terminal, and an output terminal electrically connected with a discharge mechanism. The inspection circuit is configured such that, in a state where a first electric connection is made in the first wiring structure and a second electric connection is made in the second wiring structure, at the time of applying charges to first and second electrodes, the charge applied to the second electrode flows to the drive terminal through the second wiring structure to bring the input terminal and the output terminal of the switching circuit into an electrically conducted state, and the charge applied to the first electrode flows to the discharge mechanism through the first wiring structure and the switching circuit.
Inventors:
Mitsuyoshi Endo
Application Number:
JP2013016958A
Publication Date:
April 26, 2016
Filing Date:
January 31, 2013
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/66; G01R31/302
Domestic Patent References:
| JP11121561A |
Attorney, Agent or Firm:
Hirohito Katsunuma
Yasukazu Sato
Yasushi Kawasaki
Takeshi Sekine
Hiromi Oura
Yasukazu Sato
Yasushi Kawasaki
Takeshi Sekine
Hiromi Oura