Title:
An inspection data processing device for charged particle beam devices
Document Type and Number:
Japanese Patent JP6133603
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a technique for automating classification about length measurement and shape observation that has been performed visually and for supporting determination by an operator.SOLUTION: An inspection data processing device for a charged particle radiation device includes: a length measurement unit for calculating a length measurement value of a length measurement target pattern in an observation image; an outline extraction unit for calculating a value of a shape error between design data of the length measurement target pattern and the outline of the length measurement target pattern in the observation image; a statistical computation unit for generating information in which a first value indicating variations in the length measurement value, a second value indicating variations in the shape error value and positional information of the length measurement target pattern are associated with each other; and a display unit for displaying at least the information generated by the statistical computation unit.
Inventors:
Chikako Abe
Application Number:
JP2013008554A
Publication Date:
May 24, 2017
Filing Date:
January 21, 2013
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01B15/00; G01B15/04
Domestic Patent References:
| JP200231525A | ||||
| JP2012112974A | ||||
| JP200519808A | ||||
| JP2011191296A |
Foreign References:
| WO2010052855A1 | ||||
| US6326618 |
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Sekiya Mitsuo
Toshiaki Watanabe
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