An inspection device and an inspection method - Hamamatsu Photonics Co., Ltd.

Title:

An inspection device and an inspection method

Document Type and Number:

Japanese Patent JP6151832

Kind Code:

B2

Inventors:

Suzuki Shinsuke
Hirotoshi Terada
Shunsuke Matsuda

Application Number:

JP2016163398A

Publication Date:

June 21, 2017

Filing Date:

August 24, 2016

Export Citation:

Assignee:

Hamamatsu Photonics Co., Ltd.

International Classes:

H01L21/66

Domestic Patent References:

JP200091170A
JP2002340990A

Attorney, Agent or Firm:

Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama

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