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Title:
INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2022166082
Kind Code:
A
Abstract:
To provide an inspection device which enables inspection time to be significantly shortened.SOLUTION: An inspection device comprises: a stage on which a sample is placed and which continuously moves; a primary optical system which irradiates the sample on the stage with a primary beam; a retarding electric power source which applies the retarding voltage to the sample on the stage; a voltage control unit which changes the retarding voltage in such a manner that the landing energy of the primary beam achieves both of an inspection energy condition and a precharge energy condition; a detector including a secondary sensor which generates an image of a secondary beam generated from the sample by irradiating the sample with the primary beam; and a secondary optical system which guides the secondary beam to the secondary sensor. The voltage control unit overlaps a pulse synchronized with the feeding speed of a pixel of the secondary sensor on the retarding voltage in such a manner that both of the precharge energy condition and the inspection energy condition are sequentially achieved within one pixel of the secondary sensor.SELECTED DRAWING: Figure 18

Inventors:
Masanori Hatakeyama
Application Number:
JP2022124454A
Publication Date:
November 01, 2022
Filing Date:
August 04, 2022
Export Citation:
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Assignee:
Ebara Corporation
International Classes:
H01J37/29; H01J37/06; H01J37/28; H01L21/66
Domestic Patent References:
JP2016127023A2016-07-11
JP2012253007A2012-12-20
Foreign References:
WO2018155545A12018-08-30
US20090026912A12009-01-29
Attorney, Agent or Firm:
Seiji Ohno
Hideki Kobayashi
Hiroyuki Ohno
Morita Koji
Rika Fukami
Tomohiro Matsuno
Seiichi Sakatani
Hiroshi Nomoto



 
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