Title:
検査装置
Document Type and Number:
Japanese Patent JP7199243
Kind Code:
B2
Abstract:
To provide an inspection device with which it is possible to generate highly accurate height data without requiring a complex computation process, even when the temperature of a light generating element and its support member rises.SOLUTION: A measurement object is irradiated with structured light generated by a light generating element 118 through a light projection lens 119. The structured light reflected from the measurement object in the direction of an optical axis ax0 of an imaging unit is received by an imaging element, and height data indicating the height image of the measurement object is generated. The light generating element 118 and the light projection lens 119 are supported by a light projection base 110b composed of metal having larger linear expansion coefficient than the light generating element 118. The light projection base 110b has a contact surface 15a facing the optical axis ax0 of the imaging unit. The light generating element 118 is urged in a direction heading toward the contact surface 15a by a fixed member while being supported by the light projection base 110b so as to move away from the optical axis ax0 of the imaging unit.SELECTED DRAWING: Figure 8
Inventors:
Satoshi Obuse
Shuhei Ohno
Shuhei Ohno
Application Number:
JP2019021813A
Publication Date:
January 05, 2023
Filing Date:
February 08, 2019
Export Citation:
Assignee:
Keyence Corporation
International Classes:
G01B11/02
Domestic Patent References:
| JP2016194607A | ||||
| JP2017090140A | ||||
| JP2073112A | ||||
| JP1312407A | ||||
| JP6129813A |
Attorney, Agent or Firm:
Fukushima Shoto
Masahiro Nakagawa
Hideyuki Sawamura
Masahiro Nakagawa
Hideyuki Sawamura