Title:
検査装置
Document Type and Number:
Japanese Patent JP7305585
Kind Code:
B2
Abstract:
According to one embodiment, an inspection device includes: a lens barrel that irradiates a substrate having a first main surface on which a pattern is formed with a charged particle; a terminal that comes into contact with the substrate at a first site on a second main surface of the substrate or on a side surface of the substrate and applies a predetermined potential to the substrate; and at least one light source that irradiates a predetermined area of the substrate including the first site with light.
Inventors:
Masanori Kadowaki
Application Number:
JP2020045476A
Publication Date:
July 10, 2023
Filing Date:
March 16, 2020
Export Citation:
Assignee:
Kioxia Corporation
International Classes:
H01J37/20; G01B15/04; H01J37/28; H01L21/66
Domestic Patent References:
| JP2012248535A | ||||
| JP11354621A | ||||
| JP2008016858A | ||||
| JP2019117828A | ||||
| JP2016139530A | ||||
| JP9097583A |
Foreign References:
| US6507029 | ||||
| US20030094572 | ||||
| US9666411 |
Attorney, Agent or Firm:
Sakai International Patent Office
Previous Patent: Method for producing sintered body of composite material
Next Patent: Rotor of rotary electric machine
Next Patent: Rotor of rotary electric machine