Title:
An installation method of the contact for vacuum pumps which connects a vacuum pump to the lens barrel part of an electron beam application device, and the contact
Document Type and Number:
Japanese Patent JP6271852
Kind Code:
B2
Abstract:
A vacuum pump connecting apparatus has a first vibration absorbing portion and a second vibration absorbing portion which are connected to an evacuation connection portion so as to dispose the first and second vibration absorbing portions opposite each other via the evacuation connection portion. A first end of the first vibration absorbing portion is connected to the evacuation connection portion and a second end of the first vibration absorbing assembly opposite to the second end is connected to an intake port of a vacuum pump. The first vibration absorbing portion and the second vibration absorbing portion are elastic bellows. A first end of the second vibration absorbing portion is connected to the evacuation connection portion. The vacuum pump connecting apparatus has a rigid coupling member which is connected to a second end of the second vibration absorbing portion opposite to the first end of the second vibration absorbing portion.
Inventors:
Matsutaro Miyamoto
Application Number:
JP2013072410A
Publication Date:
January 31, 2018
Filing Date:
March 29, 2013
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04D19/04; H01J37/16; H01J37/18; H01L21/027
Domestic Patent References:
| JP2007165232A | ||||
| JP4031675A | ||||
| JP4147548A |
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yukio Kanegae
Koichi Kushida
Makoto Watanabe
Toru Miyamae
Yukio Kanegae
Koichi Kushida
Makoto Watanabe