Title:
WHITE INTERFERENCE DEVICE AND MEASUREMENT METHOD OF WHITE INTERFERENCE DEVICE
Document Type and Number:
Japanese Patent JP2018048914
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a white color interference device capable of simultaneously measuring a thickness and a refractive index of an object to be measured, and a measurement method of the white color interference device.SOLUTION: A white interference device comprises: a light splitting part which splits white light emitted from a white light source into measurement light and reference light; a distance variation part which varies a distance of the measurement light between the light splitting part and an object of measurement which is arranged in a measurement optical path; an interference signal detection part which detects an interference signal when the distance varying part varies the distance; a first detection part which detects a first distance at which the measurement light is focused on a first plane of the object of measurement and a second distance at which the measurement light is focused on a second plane of the object of measurement; a second detection part which detects a third distance at which a peak of an interference signal corresponding to measurement light reflected by the first plate is detected and a fourth distance at which a peak of an interference signal corresponding to measurement light reflected by the second plane is detected; and an arithmetic part which computes a refractive index and a thickness of the object of measurement.SELECTED DRAWING: Figure 1
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Inventors:
AOTO TOMOHIRO
Application Number:
JP2016184638A
Publication Date:
March 29, 2018
Filing Date:
September 21, 2016
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
G01N21/45; G01B11/02
Attorney, Agent or Firm:
Kenzo Matsuura
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