碍子およびその製造方法、並びに荷電粒子線装置

Title:

碍子およびその製造方法、並びに荷電粒子線装置

Document Type and Number:

Japanese Patent JP5398357

Kind Code:

B2

Abstract:

To provide an insulator which has high insulation resistance and hardly deteriorates.

The insulator (2) includes a pair of electrodes (4a, 4b), and a base body (5) arranged between the pair of electrodes (4a, 4b). A part of a zone (5a) on the surface of the base body (5) is semi-conductive, and the other zone (5b) on the surface of the base body is made of an insulating crystal. The part of the semi-conductive zone (5a) is electrically connected with the pair of electrodes (4a, 4b). Further, the base body (5) has a surface resistance value of 106-1011Ω/square on the part of the zone (5a), and has the surface resistance value of 1012Ω/square or more on the other zone (5b).

Inventors:

Yukio Noguchi

Application Number:

JP2009129749A

Publication Date:

January 29, 2014

Filing Date:

May 29, 2009

Export Citation:

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Assignee:

KYOCERA CORP.

International Classes:

H01B17/26; H01B19/00; H01J37/065

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