Title:
INTERLOCK DEVICE AND GAS PRESSURE DEVICE
Document Type and Number:
Japanese Patent JP2017089694
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an interlock device not applying bad influence to equipment in a circuit and provide a gas pressure device including the interlock device even in the case that compressed gas is supplied from the other supply port under a state in which one supply port of the two supply ports is released at a gas pressure driving circuit utilizing a double-acting cylinder.SOLUTION: An interlock device comprises a first path 71, a second path 72, a first pilot path 81, a first selector valve 73, a third path 83, a first check valve 75 and a pressure adjustment valve 79. The first pilot path 81 is connected to the second path 72. The first selector valve 73 is connected to the first pilot path 81 and the first path 71 is opened by compressed gas flowed from the second path 72. The first check valve 75 is arranged at the first pilot path 81 to shield flow toward the second path 72. The third path 83 is connected to the first pilot path 81 between the first check valve 75 and the first selector valve 73. The pressure adjustment valve 79 is installed at the third path 83.SELECTED DRAWING: Figure 1
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Inventors:
WADA SHINICHI
INOUE HIDEAKI
INOUE HIDEAKI
Application Number:
JP2015217287A
Publication Date:
May 25, 2017
Filing Date:
November 05, 2015
Export Citation:
Assignee:
ULVAC CORP
International Classes:
F15B20/00; F15B11/06
Attorney, Agent or Firm:
Junichi Omori
Mitsuru Takahashi
Ori Akira
Masayoshi Sekine
Teppei Nakamura
Ayako Kaneko
Nozomi Yoshida
Shintaro Kanayama
Chiba Ayako
Shiraka Tomohisa
Mitsuru Takahashi
Ori Akira
Masayoshi Sekine
Teppei Nakamura
Ayako Kaneko
Nozomi Yoshida
Shintaro Kanayama
Chiba Ayako
Shiraka Tomohisa