Title:
インターロック装置および気体圧装置
Document Type and Number:
Japanese Patent JP6559047
Kind Code:
B2
Inventors:
Shinichi Wada
Inoue Hideaki
Inoue Hideaki
Application Number:
JP2015217287A
Publication Date:
August 14, 2019
Filing Date:
November 05, 2015
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F15B20/00; F15B11/06
Domestic Patent References:
| JP2012251623A | ||||
| JP8510678A | ||||
| JP4015303A | ||||
| JP60051302U |
Foreign References:
| US20020000158 | ||||
| US20020056363 | ||||
| WO2006011627A1 |
Attorney, Agent or Firm:
Junichi Omori
Mitsuru Takahashi
Ori Akira
Masayoshi Sekine
Teppei Nakamura
Ayako Kaneko
Nozomi Yoshida
Shintaro Kanayama
Chiba Ayako
Shiraka Tomohisa
Mitsuru Takahashi
Ori Akira
Masayoshi Sekine
Teppei Nakamura
Ayako Kaneko
Nozomi Yoshida
Shintaro Kanayama
Chiba Ayako
Shiraka Tomohisa