Title:
IONIZATION VACUUM GAGE AND PRESSURE MEASURING METHOD
Document Type and Number:
Japanese Patent JP2017015738
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an ionization vacuum gage which reduces stress of an electron source without suffering from damage from sputtering in operation at various pressure levels, a pressure measuring method using such the ionization vacuum gage, and various methods in a vacuum gas atmosphere.SOLUTION: An ionization vacuum gage 100 comprises: an electron source 105 that emits electrons 125; an anode 120 that forms an ionization space; and a collector electrode 110 to collect ions generated by impact between the electrons and gas in the ionization space. In addition, a controller 105a actively controls emission current from the electron source 105 during operation in response to detection parameters other than pressure.SELECTED DRAWING: Figure 1
Inventors:
CARMICHAEL RALLY K
JESSE A WEBER
JOHN H HENRY
MICHAEL N SCHOTT
GERANDO A BRUCKER
KENNETH D VAN ANTWERP
JESSE A WEBER
JOHN H HENRY
MICHAEL N SCHOTT
GERANDO A BRUCKER
KENNETH D VAN ANTWERP
Application Number:
JP2016207564A
Publication Date:
January 19, 2017
Filing Date:
October 24, 2016
Export Citation:
Assignee:
MKS INSTR INC
International Classes:
G01L21/32
Domestic Patent References:
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Foreign References:
| US5801535A | 1998-09-01 | |||
| WO2005045877A1 | 2005-05-19 |
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Kenichi Nakata
Daisuke Kaneko
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Kenichi Nakata
Daisuke Kaneko