Title:
冷電子増倍放出源を備える電離真空計
Document Type and Number:
Japanese Patent JP5762749
Kind Code:
B2
Abstract:
An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons. The ionization gauge includes an ionization volume in which the electrons impact a gaseous species, and a collector electrode for collecting ions formed by the impact between the electrons and gas species. The collector electrode can be surrounded by the anode, or the ionization gauge can be formed with multiple collector electrodes. The source of electrons can provide for a spontaneous emission of electrons, where the electrons are multiplied in a cascade.
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Inventors:
Blacker Gerald A.
Application Number:
JP2010539468A
Publication Date:
August 12, 2015
Filing Date:
December 17, 2008
Export Citation:
Assignee:
MKS INSTRUMENTS,INCORPORATED
International Classes:
G01L21/30
Domestic Patent References:
| JP2007529096A | ||||
| JP6135325A | ||||
| JP2000329634A | ||||
| JP61145429A | ||||
| JP2001166100A | ||||
| JP200562176A | ||||
| JP7181095A | ||||
| JP1143928A | ||||
| JP2001357792A |
Foreign References:
| US6239549 |
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Kenichi Nakata
Daisuke Kaneko
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Kenichi Nakata
Daisuke Kaneko