Title:
接合装置および接合装置メンテナンス方法
Document Type and Number:
Japanese Patent JP4885235
Kind Code:
B2
Inventors:
Masato Kinouchi
Satoshi Tahara
Takayuki Goto
Kensuke Ide
Satoshi Tahara
Takayuki Goto
Kensuke Ide
Application Number:
JP2008544701A
Publication Date:
February 29, 2012
Filing Date:
August 12, 2008
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
B23K15/00; H01L21/02
Domestic Patent References:
| JP2006294481A | 2006-10-26 | |||
| JP2008501222A | 2008-01-17 | |||
| JPH0676782A | 1994-03-18 | |||
| JPS61140390A | 1986-06-27 | |||
| JPH05202467A | 1993-08-10 |
Attorney, Agent or Firm:
Minoru Kudo