Title:
METHOD FOR PROCESSING POLYCRYSTALLINE MATERIAL SURFACE, AND METHOD FOR BONDING POLYCRYSTALLINE MATERIAL PROCESSED BY USING THE SAME
Document Type and Number:
Japanese Patent JP2017084887
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for processing a polycrystalline material surface, by which a surface of a polycrystalline material can be polished with a roughness of a nanometer order.SOLUTION: A method for processing a polycrystalline material surface comprises the steps of performing the removal of a convex portion and the regeneration of an amorphous coating within a thickness of the amorphous coating which is present in a polycrystalline material surface, thereby performing the smoothing with a nanometer-order roughness.SELECTED DRAWING: Figure 1
Inventors:
KANENO YUJI
KIKUCHI HIROSHI
MIYAJIMA KENTARO
DEGAWA MUNENORI
KIKUCHI HIROSHI
MIYAJIMA KENTARO
DEGAWA MUNENORI
Application Number:
JP2015209509A
Publication Date:
May 18, 2017
Filing Date:
October 26, 2015
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD
International Classes:
H01L21/02; B23K15/00; B23K15/08; B23K20/00; B24B1/00
Domestic Patent References:
| JP2000204356A | 2000-07-25 | |||
| JP2010255039A | 2010-11-11 | |||
| JP2000171234A | 2000-06-23 | |||
| JPH05263278A | 1993-10-12 | |||
| JP2007041010A | 2007-02-15 | |||
| JP2012141181A | 2012-07-26 | |||
| JP2008227283A | 2008-09-25 | |||
| JP2015085343A | 2015-05-07 |
Foreign References:
| WO2015115367A1 | 2015-08-06 | |||
| WO2015152041A1 | 2015-10-08 |
Attorney, Agent or Firm:
Polaire Patent Business Corporation