PURPOSE: To stabilize an X-ray irradiation amount and to widen the degree of freedom of an irradiation object by trapping a target material evaporated with a trapping film and by renewing the trapping film.

CONSTITUTION: A trapping film 18 with high X-ray transmission ability, such as a beryllium film, a synthetic resin film, a mica film, and a silicon film, which traps an evaporated material from a rotating target 11 together with X-ray generated in an X-ray source is installed. Although X-ray released from the target 11 passes the film 18 and reaches an irradiation object 16, evaporated particles released from the target 11 are trapped by the film 8 before depositing on the object 16. By renewing the film 18 every irradiation or by continuous rotation, decrease in X-ray irradiation amount in multiple irradiation is prevented. A stable X-ray source is obtained, and the degree of freedom of the object is widened by setting the object 16 in the outside environment such as an atmospheric environment.